Compact MBE

Our latest compact MBE tool could be installed with small foot print. Our MBE is suitable for R&D Labs and designed to deliver cutting edge technology with high accuracy. The system is designed to reach <1 x 10-10 Torr at room temperature and could be configured for 11 x CF2.75’’ ports for up to 44 types sources. Additionally, 2 x CF 4.5’’ ports are available according to customer requirement. Furthermore, the equipment is equipped with load lock chamber for quick sample change. Could be configured with RHEED, RGA and QCM growth speed. Heating stage could reach up to 1200 degree Celsius. The systems are suitable for III-N, III-As, Metals, oxides and 1 D materials.